マシンタイプ
magnetron sputtering coater
次元(L*W*H)
1090mm X 900mm X 1250mm
Product name
Three target magnetron sputtering coater
Sputtering power supply
2 DC power: 500W 1 RF power: 300W
Vacuum chamber size
450 mm Diameter x 450 mm height
observation window size
100 mm diameter
Magnetron sputtering head
three 3-inch target
The sample table size
150mm dia.
Gas flow controller
Range :0-200sccm (argon)
Vacuum pump
molecular pump system
Vacuum gauge
EF Kompirani vacuum gauge MPG400
Film thickness gauge
The quartz vibration film thickness gauge