マシンタイプ
electron beam evaporation
substrate
glass and silicon wafers,PDMS, PTFE and PI.
Advantage
evaporation various refractory metal materials
Kinds of coating
conductive,semiconductor,ferroelectric,optical
Vacuum chamber size
Phi 500 *H500
Electronic gun
6-hole crucible
Sample heating temperature
<500 C.
Vacuum pumping system
molecular pump + mechanical pump
After-sales Service Provided
Online support