マシンタイプ
electron beam evaporation
Product name
Electron Beam Evaporation Coating System
substrate
glass and silicon wafers,PDMS, PTFE and PI.
Advantage
evaporation various refractory metal materials
Kinds of coating
conductive,semiconductor,ferroelectric,optical
evaporation chamber siz
Phi 500 *H500
Electronic gun
6-hole crucible
Sample
<150mm <500 C. turntable
Vacuum pumping system
molecular pump + mechanical pump
Coating thickness
unevenness < 6%
After-sales Service Provided
Video technical support, Online support
After Warranty Service
Online support
Local Service Location
None
