マシンタイプ
electron beam evaporation
Vacuum chamber size
Phi 500 *H500
Electronic gun
6-hole crucible
Sample heating temperature
<500 C.
Limit vacuum
less than 5x10-5Pa(baked for 12 to 24 hours)
Pumping Rate
< 5x10-4Pa within 40 minutes from atmospheric start
Vacuum pumping system
molecular pump + mechanical pump
Coating thickness
less than 6%(unevenness)
Technology
electron beam evaporation
After-sales Service Provided
Online support