Product name
three target magnetron sputtering coater with UPS
Magnetron Sputtering Head
2 inch*3
RF Generator
3 * RF 300W power supply with auto match
Chamber material
Stainless Steel 304
Chamber size
Dia. 325 mm * H 385 mm
Sample stage
Dia. 150mm,0-40rpm adjustable,up to 700oC
Application
ceramic, dielectric, optical, oxide, hard, PTFE
Mass Flow Meter
up to 20sccm
Control System
by PC or PLC, to control