マシンタイプ
lab coating machine
電圧
220VAC 50/60Hz, single phase
Local Service Location
United States
After-sales Service Provided
Engineers available to service machinery overseas
vacuum chamber
stainless steel
Sample holder size
140mm dia. for. 4" wafer max
Specimen chamber
Quartz glass tube
chamber size
167mm OD. x 152mm ID x 260mm Height
Sputtering Head
2" magnetron sputtering head
sample stage
50 mm Dia stainless steel