Effective measuring stroke
400*300*200mm
Z-axis focus lifting range
≤200mm(height can be customized)
object field
10.6-1.6mm, working distance ≤ 90mm
Grating ruler resolution
0.0005mm
X and Y axis accuracy
U≤(2.5+L/200)μm
Error of z-axis coordinates
E≤(5+L/150)μm
Glass table size
428*328mm
Glass and carrying weight
≤30kg
Image magnification
20-180X (optional 40-220X)