モデル番号
CMF HC2M801NEGEZZZR1
Mass flow accuracy (Liquid)
±0.10% of rate
Mass flow repeatability (Liquid)
±0.05% of rate
Volume flow accuracy (Liquid)
±0.10% of rate
Volume flow repeatability (Liquid)
±0.05% of rate
Mass flow accuracy (Gas)
±0.35% of rate
Mass flow repeatability (Gas)
±0.20% of rate
Density accuracy (Liquid)
±0.0005 g/cm3 (±0.5 kg/m3)
Density repeatability (Liquid)
±0.0002 g/cm3 (±0.2 kg/m3)
Temperature accuracy
±1 °C ±0.5% of reading
Sensor maximum working pressure
1,480 psig (102 barg)
