マシンタイプ
lab pulse laser coating
コアコンポーネント
ポンプ, Laser beam scanning device
Product name
pulse laser coating equipment
Coating film
superconducting , semiconductor , ferroelectric , ultra-hard
Vacuum chamber
Sphere structure, size:diam 300mm
Vacuum pump
Molecular pumps and mechanical pumps
Vacuum degree
reach 5x10-3Pa in 20 minutes
Rotating target platform
30mm, 5-60 rpm
Sample size
1 inch, 800±1C,5-60 rpm
Gas circuit system
1-circuit mass flow controller
Laser beam scanning device
2D scanning mechanical platform
Computer control
target/sample rotation, sample temp control, laser beam scanning