マシンタイプ
コーティング機器, furnace, annealing furnace
Product name
Halogen lamp RTP annealing furnace
Keywords
Annealing furnace
Supply voltage
AC220V, 50Hz
Size of substrate
6 inches
Dimensions
870mm*650mm*620mm
Temperature range
150-1250℃
Uniformity of temperature
≤±1.5% (@800℃, Silicon wafer)
Temperature repeatability
≤ ±3℃