マシンタイプ
magnetron sputter coating machine
キーセールスポイント
High efficiency
適用産業
製造工場, Industrial Manufacture, Lab Research
Product name
Magnetron Sputtering Coater
Magnetron sputtering target
3" x 3 target
Vacuum chamber material
SS304 stainless steel
Mechanical pump
Imported oil-free diaphragm pump
Vacuum measurement
Resistance gauge + ionization gauge
Pumping rate
Oil-free pump 0.49L/s Molecular pump: 40L/S